Readers,

  I'm in need of a source of CVD TiN for 150 mm substrates. The source must
be CVD due to high aspect ratio topography on the devices at that stage. My
search has already included a number of wafer/process foundries as outlined
in the following: Elume Corp. (awaiting answer), Noel Technologies (no
source),
Process Specialties (no source), Strataglass (no source), Silicon Quest
(awaiting answer), Wafernet (8" only), PCA (awaiting answer) Thus far, no
one on my contact list of foundries has an advertised capability to run 6"
wafers through CVD TiN, they are still trying other sources on their contact

lists. Any information about alternate sources (university, small company,
etc.)
would be appreciated. Our company may be in a position to pay for
facilitization of a CVD tube to utilize this process at an appropriate
facility, if
necessary. Thanks in advance for any leads.

John


John M. Koons
Process Engineer
Innovative Micro Technology
805-681-2816
jm_koons@innovativemicrotech.com