Hello MEMS group, I am a graduate student from Univ of South Florida.Actually I am doing a project in which I need to do the oxidation of <110> silicon wafers.I want the oxidation rate chart of <110>silicon wafer.I would be thankful if you provide me the necessary information as soon as possible as I have a dead line to meetYour help will be appreciated. Thanking You Manjula Rao.