durusmail: mems-talk: sacrificial polymer layer info.
sacrificial polymer layer info.
2001-05-21
sacrificial polymer layer info.
He Qing Wen
2001-05-21
Hello,
I am looking for references and information about use of polymer and organic
materials for use as sacrificial layers in mems. I would appreciate if you
could send me information on that. If sufficient interest exists , i'll post
a summary on this list.
Thanks.
Qing Wen
Institute of Microelectronics, Singapore


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