Rose,

You might also try ISSYS in Michigan.

Regards,
Mike Mattes
Medtronic, Inc.


>>> Mike  05/15/01 09:37PM >>>
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Rose,

IC Sensors is a company in California (you've probably already heard =
about them) that makes pressure sensors.  I don't know if they go as low =
as 10e-4 Torr, but you can ask them.  Also, they are doing some custom =
stuff for us, so who knows what they might do for you...

TNX -- Mike



      From:   Rose Zhang =20
      To:   mems@ISI.EDU=20
      Date:   Wed, 05 Nov 1997 12:17:41 -0500=20
      Message-Id:   <2.2.32.19971105171741.00699b4c@pophost.ino.qc.ca>=20
      Subject:   Vacuum pressure sensor =20

Hello everybody,

We are looking for vacuum pressure sensors in die form that can be
wire-bonded in a small vacuum package to monitor the absolute pressure. =
The
pressure range is from 1e-4 torr to atmosphere. Does anyone have any =
idea
where we can get one? We wouldn't mind even if they are only prototypes.

Thanks!

Rose Zhang
Photonic materials & processes
National optics institute
Quebec, Canada
Tel:(418)657-7006
Fax:(418)657-7009




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Rose,
 
IC Sensors is a company in California =
(you've=20
probably already heard about them) that makes pressure sensors.  I =
don't=20
know if they go as low as 10e-4 Torr, but you can ask them.  Also,=20
they are doing some custom stuff for us, so who knows what they =
might do=20
for you...
 
TNX -- Mike
 
 
 


  

  

    
From:
    
 
    
Rose Zhang <zhang@ino.qc.ca>
  

    
To:
    
 
    
mems@ISI.EDU
  

    
Date:
    
 
    
Wed, 05 Nov 1997 12:17:41 -0500
  

    
Message-Id:
    
 
    
<2.2.32.1=
9971105171741.00699b4c@pophost.ino.qc.ca>
  

    
Subject:
    
 
    
Vacuum pressure sensor =
Hello everybody,

We are looking for vacuum pressure sensors in die form that can be
wire-bonded in a small vacuum package to monitor the absolute pressure. =
The
pressure range is from 1e-4 torr to atmosphere. Does anyone have any =
idea
where we can get one? We wouldn't mind even if they are only prototypes.

Thanks!

Rose Zhang
Photonic materials & processes
National optics institute
Quebec, Canada
Tel:(418)657-7006
Fax:(418)657-7009



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