Hello Zhang, Try contacting the following: AMMT Advanced Micromachining Tools GmbH A.-Feuerbach-Str. 6 D-67227 Frankenthal Deutschland/Germany Tel.: +49-6233-4960014 Fax: +49-6233-436214 eMail: mailto:info@ammt.de WWW: http://www.ammt.de Regards Dr Anil Patel BAE SYSTEMS Infra-Red Ltd Caswell, Towcester Northants NN12 8FH UK. -----Original Message----- From: Zhang Qing Xin [mailto:qingxin@ime.org.sg] Sent: 05 June 2001 10:59 To: MEMS@ISI.EDU Subject: TMAH etching equipment. I'm looking for a TMAH silicon etching equipment which is specially for 6" wafer, any information is highly appreciated. Thanks and regards. ZQX ******************************************************************** This email and any attachments are confidential to the intended recipient and may also be privileged. If you are not the intended recipient please delete it from your system and notify the sender. You should not copy it or use it for any purpose nor disclose or distribute its contents to any other person. ********************************************************************