Hello, I need etch the 0.05 micron thick gold layer after I do copper electroplating. But I find the gold etch will etch the copper structures. Did someone know how to remove the gold layer but not distory the copper structures ? ( Except the ion milling ) Thanks for your help Ren Yang __________________________________________________ Do You Yahoo!? Get personalized email addresses from Yahoo! Mail - only $35 a year! http://personal.mail.yahoo.com/