photoresist coatings
Dear MEMS group readers,

1- in which way affects nitride and SiO2 and its removal the surface character
of Si and the shape of the edges/corners?

2- I am looking for some vendors / service providers who offer photoresist
coatings for high aspect ratio surfaces. Does anyone know that?


Thank you for your help.

Bernd
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Bernd Schoeberle (Graduate Student)
University of Freiburg (Ger), Faculty of applied sciences
schoeber@imtek.de
www.imtek.de
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