durusmail: mems-talk: photoresist without xylene
photoresist without xylene
2001-02-02
photoresist without xylene
Akira Akiba
2001-02-02
Dear MEMS colleagues:

Would you please recommend me some photo resist, which has characters as
followings?
1 $B!% (BThe resist doesn't include xylene
2 $B!% (BIt survives in the alkali solution.
Any information is welcome.
Thank you very much in advance.

Best Regards.

Akira
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Akiba, Akira
akiba@ant.trc.omron.co.jp

OMRON Corporation
Technology Development Group
Corporate Research and Development H.Q.
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