durusmail: mems-talk: laser bonding problem
laser bonding problem
2001-02-12
laser bonding problem
Guo Hui
2001-02-12
Dear MEMS colleague:

I am doing some research work for laser bonding. But until now have not I got
any
good result.
Here is what I use: Nd:YAG laser (532nm)  for silicon glass bonding

I have some problems:

1). I do not have a clean environment for the bonding experiment. Do you think
there is any possibility to bond Si-Glass together under the normal codition?

2). The strength I got is so weak. How to impove the bonding strength?

3). The laser beam is a Gaussian shape. Do you think an uniform distribution
power could impove the bonding effect?

Thanks a lot in advance!

Guo Hui


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