Hi

We want to seal a SU-8 flow-channel with a PDMS lid. We have been trying
to treat the substrates with oxygen plasmas, but the bonding is still very
poor. Has any of you done anything similar or used other methods to
increase bond strength? What are the conditions?

Any help is appreciated

Jamil El-Ali
Mikroelectronic centret
DTU
jea@mic.dtu.dk