Hi Andreas and others,
you can try (but it does not fulfill your requirement "inside Germany")
Institute of Microelectronics, Singapore.
As far as the processes are concerned, we have 6 and 8 inch facilities with
0.8 and 0.18 full CMOS and back end CMOS processes, respectively.
0.8 um line (6 inch) have full MEMS capability. 0.18 (8inch) is rather
limited from MEMS point of view but it is very suitable for combining CMOS
with postprocessing like IR focal plane array.
Pavel


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From: Andreas Albrecht
To: MEMS@ISI.EDU
Sent: 2/17/01 12:57:59 AM
Subject: Si wafer facilities for microsystem fabrication

Dear colleagues
who knows Si wafer manufacturing facilities in R&D institutes (because
of small to medium volume production) prefered in Germany and could tell
me which
wafer sizes are processed there.

There is an urgent need for 6" wafer foundry processes.

Regards
Andreas Albrecht

Transferzentrum Mikroelektronik e.V.
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