>Hi ! > > Could someone please instruct me as to where I might find some >information regarding the Electrostatic Bonding of Silicon Wafers... > > Thanks, > > Michel Rosa. Ph.D Candidate Griffith University (Australia) > Dear Michel Two papers that I have written maybe of interest, they are: "Selection of glass, anodic bonding conditions & material compatibility for silicon-glass capacitive sensor" T. Rogers, J.Kowal Published in Sensors and Actuators A 46-47 (1995) 113-120 AND "Considerations of anodic bonding for capacitive type silicon/glass sensor fabrication" Tony Rogers Published in J. Micromech. Microeng. 2 (1992) 164-166. Regards Tony Rogers Applied Microengineering Ltd 68 Milton Park, Abingdon, OXON, OX14 4RX, UK. Tel: +44 (0) 1235 833 934 Fax: +44 (0) 1235 833 935 WWW: http://www.aml.co.uk e mail: aml@aml.co.uk