durusmail: mems-talk: Re: Electrostatic Bonding Of Si Wafers
Re: Electrostatic Bonding Of Si Wafers
1996-04-03
1996-05-15
Re: Electrostatic Bonding Of Si Wafers
Robert Santilli
1996-05-15
>Hi !
>
>       Could someone please instruct me as to where I might find some
>information regarding the Electrostatic Bonding of Silicon Wafers...
>
>       Thanks,
>
>               Michel Rosa.  Ph.D Candidate Griffith University (Australia)
>
Dear Michel

Two papers that I have written maybe of interest, they are:

    "Selection of glass, anodic bonding conditions & material compatibility for
    silicon-glass capacitive sensor"

T. Rogers, J.Kowal
Published in Sensors and Actuators A 46-47 (1995) 113-120

AND

    "Considerations of anodic bonding for capacitive type silicon/glass sensor
    fabrication"

Tony Rogers
Published in J. Micromech. Microeng. 2 (1992) 164-166.

Regards

Tony Rogers

Applied Microengineering Ltd
68 Milton Park, Abingdon, OXON, OX14 4RX, UK.
Tel: +44 (0) 1235 833 934
Fax: +44 (0) 1235 833 935
WWW: http://www.aml.co.uk
e mail: aml@aml.co.uk


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