Thanks.  I have been aware of stiction problems as a major obstacle, and have
been looking into CPD for a bit now.  Lab resources are a bit limited, and one
of the main goals of my project is to make it reproducable in our fascilities
here on campus.  Perhaps looking into a CPD device is in order for our lab.  Has
anyone got an idea of a very simple/cheap alternative that would allow for less
stiction, or a stand alone device I could purchase?

The choice of our SiO2 layer is fairly important, as we are using this as our
insulator between the poly beam and the substrate.

What sort of poly(or other material) thicknesses have most of you been working
with to create beams, or free hanging structures, and what pitfalls have you run
into during fabrication?