Hi, I'm a student at ASU.We are doing a Aluminium nitride deposition on Al electrode.I would like to know the deposition conditions required for the deposition of AlN on Al electrode ( Sputter deposition of AL in the presence of nitrogen and Ar to get AlN flim),such that the thin film of AlN is piezoelectric. Any help regarding the piezoelectric properties of AlN films and their deposition techniques would be most invaluable to us. I would be extremely grateful if anybody could help. Thank you bye Sushant