Hi all

I need to pattern Silicon Nitride for which i have to open Silicon Nitride
at selected areas. Does anyone know how to etch Silicon Nitride. I would
like to use wet etching method as this is available for me right now.
Someone had suggested me using Phosphoric acid while others have suggested
HF. Can i get the concentration, temperature and etch rates for HF and
H3PO4.

Can i use Photoresist as the masking layer. Is there any specific PR for
this process.

thanks

Gururaj Shenoy


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