could somebody please tell me the steps that should be followed for cleaning the anisotropically etched wafer with KOH. i need to etch V-grooves in (100) silicon wafer using KOH. THE MAN WHO DOES NOT READ GOOD BOOKS HAS NO ADVANTAGE OVER THE MAN WHO CANNOT READ......... **************************************************************************** Ravi Shankar Engineer VLSI-FAB, Phone: 91-172-254401 Semiconductor Complex Ltd., Ext: 576,552. Phase-VIII, S.A.S Nagar, Fax:91-172-253378 Punjab. Pin:160059. E-mail: shankar@sclchd.ernet.in ****************************************************************************