durusmail: mems-talk: Mask for HF etch
Mask for HF etch
Mask for HF etch
Sonia Garcia Blanco
2001-08-23
Dear All,

I wanted to ask if anybody knows what I could use as a mask for a wet etch
of silica during 90min in 4:1 HF acid.

Thank you very much for your help!

Sonia.

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Sonia Garcia-Blanco

Department of Electronics and Electrical Engineering
University of Glasgow
Oakfield Ave.
G12 8LT
Glasgow

Phone:
   Office: (0141) 339 8855 ext 0101
   Lab:    (0141) 330 6014
Email: sgblanco@elec.gla.ac.uk

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