Hugo, Did you try the higher temperature wafer grip (120 C softening point temperature) or regular wafer grip (95 C softening point temperature)? The higher temperature wafer grip works much better, so I suggest you that a try Good luck. Ukay Ukoha-Ajike Technical Manager, Opto Chip Fab, Agere Systems. 610.939.7844, Pg: 888.798.0181, ukay@agere.com -----Original Message----- From: Hugo Jazo [mailto:hjazo@spawar.navy.mil] Sent: Thursday, August 23, 2001 10:50 AM To: mems-talk@memsnet.org Subject: [mems-talk] Wafer Bonding I've been using high temperature wax for wafer bonding - backgrinding - and eventual TMAH etching. The problem is, there is always some bit of separation of the wax around the edges of the wafer. I've also tried a product called wafergrip with not much more success. Does anyone know of a product that can bond two wafers together, withstand a TMAH etch, and hold together when subjected to 100 C? Thank you, Hugo Jazo SPAWAR Systems Center, San Diego (SSC-SD) Integrated Circuit Research and Fabrication, D876 49375 Ashburn Rd. San Diego, CA 92152-7633 Ph: 619-553-3826 Fax: 619-553-5667 hjazo@spawar.navy.mil _______________________________________________ mems-talk mailing list mems-talk@memsnet.org To unsubscribe or change your list options, use: http://fab.mems-exchange.org/mailman/listinfo/mems-talk