I'm trying to spin coat films of a diluted siloxane based polymer on
glass.  The polymer is diluted in toluene, and filtered very well prior to
coating.  It looks great before spinning, but it seems that the spin
coating process is generating tiny (<10 micron or so) bubbles in the
films, causing many defects.  Has anyone else run into a problem like
this?



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Carl Arft
Dept. of Electrical and Computer Engineering
University of California, Davis
Email: cmarft@ece.ucdavis.edu
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