durusmail: mems-talk: TMAH etch
TMAH etch
TMAH etch
Kaustubh Ramesh Bhate
2001-09-04
Hi,
Can somebody tell me what films(other than oxide and nitride) can be
used to mask one side of wafer while etching the other side with TMAH.

Thanks.


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Kaustubh Bhate
North Carolina State University
MS (Electrical Engineering)
Ph No (0) : 919 513 2271


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