Hi,

Has anyone had experience with polishing (mechanical or CMP) of
electroplated gold
surfaces? I am looking for a good surface finish  across the
surface of a 0.5 microns thick layer of gold deposited on a polished
silicon nitride surface. Would sputtering/e-beam be a better option to
getting a smoother surface? What kind of surface smmoothness should I
expect
from electroplating/sputtering/e-beam? I would appreciate any help.

Abhinav Bhushan
MicroAssembly Technologies
Richmond, CA 94806
abhinavb@microassembly.com