durusmail: mems-talk: Wafer dicing techniques
Wafer dicing techniques
2001-09-12
Wafer dicing techniques
Assaf Matia
2001-09-12
Hi,

I am interested in any info you might have on 4"/6" wafer dicing techniques.
Very gentle MEMS membranes are located on the wafer, therefor the dicing
must be very precise and smooth.

Thanks

Assaf Matia

Phone-Or
reply