hello friends I am trying to find out the material which can be spin coated on surface topography and can be planerise by using CMP or some other means and finally can be used as a sacrifacial layer in surface micromachining technology. any kind of information about this material would be highly appreciated. thax in advance > ------------------------------------------------------------------------ Get your FREE download of MSN Explorer at http://explorer.msn.com[1] ------------------------------------------------------------------------ Get your FREE download of MSN Explorer at http://explorer.msn.com[2]