You may want to try Lamda-Physik (http://www.lambdaphysik.com/). They do laser
beam machining on Silicon and Glass with hole diameters down to 1um. In the web
page - look under Service & Support / Applications Lab Capabilities. Hope this
helps.

Debjyoti.

mems-talk-request@memsnet.org wrote:

> Message: 6
> From: "Danny Klein" 
> To: 
> Date: Mon, 24 Sep 2001 14:34:17 +0200
> Subject: [mems-talk] Making small diameter holes in glass
>
> This is a multi-part message in MIME format.
>
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>
> Dear MEMS colleagues,
>
>     As a part of my thesis I am interested in making several small =
> diameter holes (100-200 micron) in a thin layer of glass (400-500 =
> micron), along a 20 mm line. Then I need to fill the holes with gold or =
> any other metal.
>     I would like to know if anyone knows any methods to drill or etch =
> those holes in glass ( Pyrex, BK-7, CdTe, BaF2 or any other material =
> that allows transmission in the visible and IR wavelengths as well).
> I would appreciate if anyone can tell me of a manufacturer that can make =
> these holes.=20
>    =20
> P.S.   I choose glass because of its relative high thermal isolation =
> property.
>
> Thank you in advance,
>
> Danny Klein
>
> -----------------------------------------------------
>
> Danny Klein
> Faculty of Mechanical Engineering
> Technion, Israel Institute of Technology
> Haifa, 32000
> Israel
>
> Tel: 972-4-8292946
> Email: dannykl@tx.technion.ac.il
>
> ----------------------------------------------------
>
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> 
>  charset=3Diso-8859-1">
> 
> 
> 
> 
> 
Dear MEMS colleagues,
> 
 
> 
    As a part of my thesis I =
> am=20
> interested in making several small diameter holes (100-200 micron) in a =
> thin=20
> layer of glass (400-500 micron), along a 20 mm line. Then I need to fill =
> the=20
> holes with gold or any other metal.
> 
    I would like to know =
> if anyone=20
> knows any methods to drill or etch those holes in glass ( Pyrex, =
> BK-7,=20
> CdTe, BaF2 or any other material that allows transmission in the visible =
> and=20
> IR wavelengths as well).
> 
I would appreciate if anyone can tell me =
> of a=20
> manufacturer that can make these holes. 
> 
    
> 
P.S.   I choose glass because of =
> its relative=20
> high thermal isolation property.
> 
 
> 
Thank you in advance,
> 

Danny Klein
> 
 color=3D#0000ff> 
> 
-----------------------------------------------------
> 
 
> 
Danny Klein
Faculty of Mechanical Engineering
Technion, =
> Israel=20
> Institute of Technology
Haifa, 32000
Israel
> 
 
> 
Tel: 972-4-8292946
Email:  href=3D"mailto:dannykl@tx.technion.ac.il">dannykl@tx.technion.ac.il DIV>
> 
 
> 
----------------------------------------------------
> 
 
>
> ------=_NextPart_000_0007_01C14505.FD98FF20--
>
> --__--__--
>
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> mems-talk mailing list
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> End of mems-talk Digest

--
Debjyoti "Deb" Banerjee, Ph.D.
Senior Consulting Engineer
Coventor Inc. (formerly Microcosm Tech.)
7 Corporate Park, Suite 260
Irvine, CA 92606.

Ph: (949) 756 5681
Mobile: (650) 743 2373
Fax: (949) 756 0070

Email: debban@coventor.com
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