Dear Manager
I am a student in UNSW in Australia. I have to do a project in MEMS but
before starting I would study a device that can helping me in future. So
could you please send me information about this device and I so thank you
for helping.
This devise is:
AN surface micromachined accelerometer envolves  a seismic mass
consisting, optical grid with parallel slots, is suspended by four
folders tethers over an array of photodiodes. The design of support is to
allow easy deflection of the seismic mass in the y direcrtion which is
the direction of acceleration the device is intended to measure.
what I need: material and physical proerties of it that we use for
seismic mass - Fabrication - dimensions - how much it deflects -
sensitivity -Thank you again very much.

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