durusmail: mems-talk: alternative to pyrex?
alternative to pyrex?
2001-11-02
alternative to pyrex?
Olgica Bakajin
2001-11-02
I am currently bonding pyrex 7740 to Si wafers but the pyrex fluoresces too
much for my application.
Can anyone suggest a different kind of glass that can be anodically bonded
to Si wafers? As I understand it, the requirement is that the thermal
expansion coefficient of the glass matches that of silicon and that there
are ions available to migrate under the electric field across the interface.
Thanks!
Olgica

reply