Dear all, I am doing experiments of RIE of Au (2000 ang.) with AZ1512 as etch mask. But I find that during Au etching using Cl2 gas, gold redeposits on my samples and its suroundings. In some condition, it makes the samples impaired. Could you please share some experience with me? I want to know how to eliminate this problem and speed up the etching process (preffered anisotropic etching). Can I use other gas mixture to etch gold ? Our RIE machine has etching gases as Cl2, O2, CF4, He, SF6. Thanks in advance, Regards, Chi Anh KIST, Seoul, Korea Find a job, post your resume. http://careers.yahoo.com