Dear Jaideep, You can try the software TRIM that simulates the penetration of ions of different energies on different materials by MonteCarlo simulations. I think you can find it on the Web.... Good luck! Sonia. ***************************************************** Sonia Garcia-Blanco Department of Electronics and Electrical Engineering University of Glasgow Oakfield Ave. G12 8LT Glasgow Phone: Office: (0141) 339 8855 ext 0101 Lab: (0141) 330 6014 Email: sgblanco@elec.gla.ac.uk **************************************************** On Mon, 5 Nov 2001, jaideep mavoori wrote: > Hello. > Is there a table/software for calculating ion implant depth vs energy for > various tilt angles for various species and substrates (Si primarily). > > Thanks. > Jaideep > _______________________________________________ > mems-talk@memsnet.org mailing list: to unsubscribe or change your list > options, visit http://fab.mems-exchange.org/mailman/listinfo/mems-talk > Hosted by the MEMS Exchange, providers of MEMS processing services. > Visit us at http://www.mems-exchange.org/