Others have indicated interest in this data and hence I am posting this for
the group.  Thanks to Michael Yakimov, for the following link.  I found it
helpful.
http://www.research.ibm.com/ionbeams/SRIM/SRIMLEGL.HTM

Thanks also for the other pointers I received, like this from Mehmet
Dokmeci:
"A year ago I had the same question and the ion implant company,
IICO and as well as the other one implant sciences do have
these tables and will fax them to you if you contact them.
Good luck,

-Mehmet"

Thanks one and all.
Jaideep

----- Original Message -----
From: "Michael Yakimov" 
To: "jaideep mavoori" 
Sent: Wednesday, November 07, 2001 7:03 AM
Subject: RE: [mems-talk] ion imlant depth vs energy for As, B, etc


> SRIM
> http://www.research.ibm.com/ionbeams/SRIM/SRIMLEGL.HTM
>
>
> > -----Original Message-----
> > From: jaideep mavoori [SMTP:jmavoori@hotmail.com]
> > Sent: Tuesday, November 06, 2001 12:46 AM
> > To: mems-talk@memsnet.org
> > Subject: [mems-talk] ion imlant depth vs energy for As, B, etc
> >
> > Hello.
> > Is there a table/software for calculating ion implant depth vs energy
for
> > various tilt angles for various species and substrates (Si primarily).
> >
> > Thanks.
> > Jaideep
> > _______________________________________________
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