Hello All,

Does anyone know how to simulate a tensile stressed membrane
using ANSYS? I have done modal, static, and harmonic analysis
without any stress in the membrane using ANSYS, but since I am
going to fabricate the membrane out of LPCVD SiN, I am expecting
to have some intrinsic tensile stress (100~200 MPa) in reality.
So, how do I include this tensile stress effect for the analysis?
By the way, we use ANSYS 5.7
Thank you for your help

Q
____________________________________________________________________
Kyu-Tae Yoo
Ph.D. candidate

Cornell University                       Phone:530-752-2522(office)
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