I am interested in collecting and collating information on releasing surface
MEMS structures. In particular, I am interested in release of poly and nitride
structures atop oxide.

If you know of published references on this topic, or have unpublished
technical reports or anecdotal information, I would be happy to compile and
post to the newsgroup.

Thanks,

Al Henning
Assoc. Prof.
Thayer School of Engineering
Dartmouth College
Hanover, NH 03755-8000
603/646-3671
603/646-3856 (FAX)
al.henning@dartmouth.edu
http://caligari.dartmouth.edu/~henning/henning.html