durusmail: mems-talk: Variable capacitors in bulk micromachining
Variable capacitors in bulk micromachining
Variable capacitors in bulk micromachining
PetterFlodström
2001-11-22
Hi,
I am investigating the microwave behaviour for a variable capacitor
device done with bulk machining. Since most microwave devices are done
with surface I havent been able to find any previous work or results.
I would appreciate if anybody could tell me were to find any paper about
this.

/Petter Flodstrvm

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