Mike, Would you mind sharing your findings on RIE services available. Sources and cost specifically. Thanks, Kevin Walsh see header below > > > Dear MEMS members, > > Does anyone know where I could go to get Reactive Ion Etching (RIE) > work done (to remove silicon and silicon oxide) on a few wafers? > I understand Berkely may provide this service. > > > Mike Hershey > Integrated Sensing Systems (ISSYS), Inc. > tel: 313-998-8671 > fax: 313-998-6789 > > > -- Dr. Kevin M. Walsh Electrical Engineering Department, Speed Scientific School University of Louisville, Louisville, KY 40292 (502) 852-0826 Internet address: kmwals01@starbase.spd.louisville.edu