durusmail: mems-talk: What is RTO?
What is RTO?
2001-11-22
What is RTO?
Tulip
2001-11-22
Hello,

Does anyone know what is RTO?
Is that Rapid Thermal Oxide?
I'm not sure about that.
If it is convenient, would you please also tell me what is the
difference between RTO and thermal oxide, no matter about the material
property or fabrication process.

Thanks a lot.

Regards,

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