durusmail: mems-talk: accelerometer
accelerometer
accelerometer
Pulok Pattanayak
2001-11-24
dear sir,
         i am doing M. Tech. my project on piezoelectric
accelerometer. but
i
couldn't get detailed informations on 'how much volatage will develope or
how much resistance will change when a particular force will be applied on
a structure contains four beams and a centre mass (which is actually my
proposed structure)?'
         in my structure wafer is n-type Si and resistors are p-type.
although i got some idea from S. M. Sze's book-semiconductor sensors, bot
that is insufficient.
         so plz. if anyone knows the details mathematical theory or from
where i can get details information, inform me.
         thnking you,
                     ....pulok pattanayak



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                             PULOK PATTANAYAK
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                               ROOM NO-B214
                                 R.P.HALL
                              I.I.T.KHARAGPUR
                                W.B.-721302
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                         e mail:p_pulok@yahoo.com

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