Is NicKel a proprietary form of nickel?  Does "soft" mean controllable?

If so you can controllably etch nickel with aluminum etch (phosphoric and
acetic acid based).

I etch chrome using Transene Chrome Etch, (ceric ammonium nitrate, if I
remember correctly)

>>> Vlttorio Guarnieri  11/26/01 09:49AM >>>
Hi all,

I am Vittorio Guarnieri, reasercher at IRST (Italy), I am interested in wet
etching for NicKel metal layer. I am evaporating, as a diffusion  barrier,
20/30 nm of Ni on silicon wafer substrate, is it possible to have a "soft"
wet etching solution for Ni? I am using also alloy of Ni/Cr and I am
interested also for the wet etch of this kind of material.
Any news will be very good for me.
Thank you
Best regards
Vittorio

Dott. Ing. Guarnieri Vittorio
MicroSystemDivision ITC-Irst
Via Sommarive, 18
38050, Povo, Trento
Italy
tel: +39 0461 314468
fax:  +39 0461 314591
guarni@itc.it
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