Hello We are doing the silicon etching through windows simultaneously from both, front and back sides using KOH solution. The masking material for silicon etching is thermally grown 1 micron thick silicon dioxide. We observed that front side oxide remains for very long time in KOH soluton. However, back side oxide does not stay for long time. It etch out very fast than front side oxide. The wafer backside roughness is much higher than frontside surface. How can we improve the backside oxide quality to be used as masking material for KOH etching Do anyone has any solution? Thanks Dr. Soumen Das Sr. Scientific Officer Microelectronics Centre Dept. of Electronics & ECE Indian Institute of Technology Kharagpur 721 302, India email: sou@ece.iitkgp.ernet.in Phone: +91-3222-81914 (O) +91-3222-81475 (Lab) +91-3222-81915 (R) Fax: +91-3222-755303/777190