durusmail: mems-talk: New Motorola Pressure Sensor Process
New Motorola Pressure Sensor Process
2001-11-29
New Motorola Pressure Sensor Process
Brett Grahms
2001-11-29
Hello,

I saw an ad concerning the new Motorola surface miromachining
CMOS process for pressure sensors (capacitive). The main
application will be TPMS !?!

I am wondering, because MOT used the bulkmicromachining in the
past. Why now the change to Surface technology ?

Could somebody help ?

Best regards,

Brett

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