Hi there, I have been using various formulations of SU-8 which has been made in house (although commercial mixes have also been used). Unfortunately the structures have been suffering from an exaggerated negative sloping sidewall problem commonly referred to as 'T-topping'. The latest base processing guidelines on the MCC website blame this problem on the lower wavelength (313nm and 334nm) output lines of mercury vapour lamps and suggest that the problem can be eliminated by optimising the spectral bandwidth (ie using an i-line filter). I was just wondering if anyone had experienced this problem and taken this step to solved the problem. Thanks in advance, Novak Farrington _____________________________________ Novak Farrington Institute of Microwaves and Photonics School of Electronic and Electrical Engineering University of Leeds Leeds LS2 9JT UK Tel. +44 (0)113 233 2092 Fax. +44 (0)113 233 2032 email: eennf@leeds.ac.uk