My experience is ~3 hours to etch 5 microns in Pyrex using 6:1 Buffered Oxide Etch. The etch rate of thermal SiO2 is 800-1000 Angstroms/min. >>> Paolo Bondavalli12/04/01 12:31AM >>> Dear MEMS experts, I'm looking for details about the selectivity factor between the SiO2 and Pyrex when they are chemically etched. Could you give me any references? Thanks a lot ********************************************** Dr. Paolo Bondavalli R&D Engineer LABCOM - Laboratoire Interconnexions Optiques et MEMS THALES (ex THOMSON-CSF) CORPORATE RESEARCH CENTER Domaine de Corbeville, Route Departementale 128 F91404 ORSAY (FRANCE) Tel : 01 69 33 08 63 Fax : 01 69 33 08 62 Email : Paolo.Bondavalli@thalesgroup.com ********************************************** _______________________________________________ mems-talk@memsnet.org mailing list: to unsubscribe or change your list options, visit http://fab.mems-exchange.org/mailman/listinfo/mems-talk Hosted by the MEMS Exchange, providers of MEMS processing services. Visit us at http://www.mems-exchange.org/