Hi Sheri and Linden,

Foturan is only a photosensitive glass.
Our negative photosensitive glass process is high etching selectivity.
But details of the phenomenon is now under study. I am very sorry to protect the
process. But near future I will open the process.
You can see some pictures fabricated by us in our web(www.memsware.com) site
We could supply the glass product or glass itself if you need.
For glass machining, various technique can be used.
We use the powder(sand) blasting and laser machining from time to time.
Ultrasonic or electrodiscahrge machining can be good for some devices.
Also molding is a good technic for glass micromicrostructures.


Best regards

Sooje Cho from MEMSware
Tel 82-2-2281-6557
e-mail sjcho@memsware.com

----- Original Message -----
From: "Heiko van der Linden" 
To: 
Sent: Friday, December 07, 2001 5:43 PM
Subject: RE: [mems-talk] photosensitive glass


> Hi Sheri,
>
> I think you are looking for Foturan. This is sold by mikroglas in
> Germany.
> Check www.mikroglas.de . The Foturan is difficult to process and you
> need
> a very high power UV lamp  for this (not a normal aligner).
> We have not so good experience though with mikroglas and maybe it's
> better
> to find another company that sells the glass.
>
> Also if you need deep etching and can live with some roughness in the
> etched
> cavities you could consider powder blasting.
>
> Greets,
> Heiko van der Linden
>
>
> *******************************
> MESA+ Research Institute
>       Twente University
>          P.O. Box 217
>      7500 AE Enschede
>        The Netherlands
> *******************************
>
>
> -----Original Message-----
> From: mems-talk-admin@memsnet.org [mailto:mems-talk-admin@memsnet.org]
> On Behalf Of Xiaoyan (Sheri) Wang
> Sent: Thursday, December 06, 2001 7:31 PM
> To: mems-talk@memsnet.org
> Subject: [mems-talk] photosensitive glass
>
>
> Hi, All,
>
> I'm looking for a type of glass that is photo-etchable or
> negative photosensitive. Does anyone know where I can get
> it? Any information is greatly appreciated.
>
> Regards,
>
> Sheri
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