Dear Colleagues, I am looking to buy an interferometer which can help me in doing modal analysis of mems devices. I am hoping to be able to measure mechanical motion with frequencies up to 50 kHz. The width of the vibrating mems device could be as small as 10 microns. I am talking to UBM, but, would like to explore other options. If you are familiar with any other company that makes such a measurement tool, please share your knowledge with me. I appreciate very much your time and help. Thanks, Vijay Dhuler