I do not believe Aqua Regia will attack chrome. There are several chrome etches available commercially (for example, Transene TFE and Transene TFD), as well as Iodine based gold etches (for example, Transene TFA). Transene TFD and TFA are both photoresist compatible (i.e. they do not attack photoresist). David Nemeth Senior Process Engineer Sophia Wireless, Inc. 14225-C Sullyfield Circle Chantilly, VA Ph: (703) 961-9573 x206 Fax:(703) 961-9576 -----Original Message----- From: mems-talk-admin@memsnet.org [mailto:mems-talk-admin@memsnet.org]On Behalf Of apatel43 Sent: Friday, December 28, 2001 2:03 PM To: mems-talk Subject: [mems-talk] chromium etchant or gold etchant?? Hi, I was wondering if someone maybe able to suggest what type of etchant i should use. I have approximately 500 angstroms of Cr deposited, followed by 1500 angstroms of Au, finally with a 50 angstoms Cr layer on top. I only deposited the top Cr layer so that polyimide would adhere well to the wafer. I would like to etch away thru all there layers. I'm sure if i should use aqua regia to etch away at the gold or should i use some sort of a Cr etch? if so which one could you suggest please... Thanks, Arti Arti Patel Research Assistant/Graduate Student University of Illinois at Chicago Department of Bioengineering 851 S. Morgan St. (m/c 063) Chicago, IL 60607 _______________________________________________ mems-talk@memsnet.org mailing list: to unsubscribe or change your list options, visit http://mail.mems-exchange.org/mailman/listinfo/mems-talk Hosted by the MEMS Exchange, providers of MEMS processing services. Visit us at http://www.mems-exchange.org/