Hi, Guys, Dose any one has experience in bonding single crystalline SiO2(quartz crystal) onto silicon? How to overcome the difficulty that their thermal expansion factors differ significantly? What is the process? Or, Which papers give detailed description of the bonding? Any reply will be greatly appreciated! Wang, Zheyao ------------------------------------------ Institute of Microelectronics Tsinghua University Beijing, 100084 China Office: Room 3-309 Phone: +86-10-62789147/51 ext. 309 E-mail: wangzy@dns.ime.tsinghua.edu.cn saab9x@yahoo.com