If you got poor results in etching (110) you either had too much water in
your etch or your wafer was of axis by several degrees.  What is your etch
solution composed of and at what temperature are you etching at?  An off axis
wafer, which are sliced on purpose that way for diffusion control, will show
what looks like a stair case of many steps.  If the cause was too much water
then you get pits and bumps and even lines.  Let us know which problem you
had and the solution is at hand.

Campman