durusmail: mems-talk: Thin PDMS membranes
Thin PDMS membranes
Thin PDMS membranes
Heiko van der Linden
2002-01-07
Hi All,

I'm interested in making thin PDMS mebranes for a microfluidic
application. For this application I would
like to make a membrane with a thickness of 40 microns and dimensions of
1cm by 2cm. I have tried
to make such a membrane by spin coating but the PDMS layer doesn't come
off of the wafer in parts
large enough for my application.
Does anyone have any hints or information on this subject ?

Kind Regards,
Heiko van der Linden

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MESA+ Research Institute
      Twente University
         P.O. Box 217
     7500 AE Enschede
       The Netherlands
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