durusmail: mems-talk: thin film thermocouples on Si-wafer
thin film thermocouples on Si-wafer
2002-01-07
2002-01-07
thin film thermocouples on Si-wafer
Jon Doe
2002-01-07
 Try SenseArray in Fremont, CA.
Good luck.
Thomas

--- Bernard Revaz 
schrieb: > Hi,
> I'm interested in measuring the local temperature
> (in the plane) of the
> back side of a metal piece during electroerosion.
> The temperature is not
> expected to rise much above 100 C.
> Is someone aware of a company that produces
> Si-wafers with integrated
> arrays of thin film thermocouples ? (something like
> 10 thermocouples per
> cm^2)
> Thanks in advance
> Bernard Revaz
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