Use Pad Etch IV from Ashland Specialty Chemical. It has NH4F + CH3COOH + H2O, which generates some HF for oxide etching, plus propylene glycol to inhibit attack of the aluminum. --Kirt Williams Agilent Technologies > -----Original Message----- > From: Ravi Shankar [mailto:shankar@sclchd.co.in] > Sent: Tuesday, December 25, 2001 10:54 PM > To: mems-talk@memsnet.org > Subject: [mems-talk] etch psg oxide with Al > > > Hi > i want to etch psg oxide without affecting aluminium, could > anybody give > me some reference regarding it. in fact i found out from > somewhere that > ammonium fluride and acitic acid is good, but could not get > any further > info on its concentration, temperature and working mechanism. > regds > ravi shankar > _______________________________________________ > mems-talk@memsnet.org mailing list: to unsubscribe or change your list > options, visit > http://mail.mems-exchange.org/mailman/listinfo/mems-talk > Hosted by the MEMS Exchange, providers of MEMS processing services. > Visit us at http://www.mems-exchange.org/