Hi Nickolay, if you have to make the nitride wafer silicon anodic bonding with silicon you must growth SiO2 on nitride wafer with high percentage of Na. Greets, Luciano Scaltrito ---------------------------------------------------------------------------- ------------ Ing. Luciano Scaltrito Dipartimento di Fisica Politecnico di Torino C.so Duca degli Abruzzi, 24 10129 Torino, Italy tel +39 011 564.7305/564.4160 fax +39 011 564.7399 E-mail : scaltrito@polito.it http://www.polito.it/centri/laborato/limadel/film/index.html ---------------------------------------------------------------------------- ------------