Here are a couple of Image Reversal recipes I use. I find that the second
one works a little better for me. Also, these are in shorthand, so some
things might be missing. The equipment I use may be different than what
you use, so don't take it literally.

This is Junghoon's recipe for image reversal with AZ 5214.

1. cleaning : 5:1 Piranha / 10 min --> rinse --> --> blow dry --> hot
plate 145~150C / 10 min
2. HMDS 3-4min
3. PR coating /AZ5214 / 4000rpm/ 30sec --> soft baking (100C, 1min)
4. Karl suss exposure / 16 ~ 18 sec (I= 6.0 mW/cm^2)
5. Hotplate 100C, 2 min
6. Flood exposure, 120 sec
7. Develop, AZ400K 1:5, short time (~20 sec.) --> hot plate 90C/ 20 sec



This is Cho's recipe for image reversal with AZ 5214.

1. cleaning : 5:1 Piranha / 10 min --> rinse --> blow dry --> hot plate
145~150C / 10 min
2. HMDS 3-4min
3. PR coating /AZ5214 / 4000rpm/ 30sec --> soft baking (100C, 1min)
4. Karl suss exposure / 18 sec (I= 6.0 mW/cm^2)
5. Hotplate 100C, 45 sec
6. Flood exposure, 180 sec
7. Develop, AZ400K 1:5, short time --> hot plate 90C/ 20 sec
8. Hard Bake.


Jesse Fowler
  UCLA/MAE Dept., 420 Westwood Plaza, Room 18-121, ENGR IV
  Los Angeles, CA 90095-1597 | (310)825-3977
"Rule #6: There is no rule #6" -- Monty Python
"ARTICLE SIX:  THIS ARTICLE IS ABOLISHED" -- Constitution of Afghanistan

On Wed, 9 Jan 2002, shaoning wrote:

> Hello, everybody,
>
> Does anyone know the contact info of manufacturer or vendor of AZ5214
> photoresist? It is said it can be reversed from positive to negative polarity
> by different baking. Thank you very much for every information.
>
> Shaoning
> _______________________________________________
> mems-talk@memsnet.org mailing list: to unsubscribe or change your list
> options, visit http://mail.mems-exchange.org/mailman/listinfo/mems-talk
> Hosted by the MEMS Exchange, providers of MEMS processing services.
> Visit us at http://www.mems-exchange.org/